The simulation of cluster tools: a new semiconductor manufacturing technology
| Title: | The simulation of cluster tools: a new semiconductor manufacturing technology |
|---|---|
| Authors: | LeBaron, H.T.; Pool, M. |
| Source: | Proceedings of Winter Simulation Conference Simulation conference Simulation Conference Proceedings, 1994. Winter. :907-912 1994 |
| Relation: | Proceedings of Winter Simulation Conference |
| Database: | IEEE Xplore Digital Library |