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Development of a micromanipulation system for special applications in handling of microcomponents

Title: Development of a micromanipulation system for special applications in handling of microcomponents
Authors: Petrovic, D.; Chatzitheodoridis, E.; Popovic, G.; Haddad, G.; Brenner, W.; Vujanic, A.
Source: ASDAM '98. Conference Proceedings. Second International Conference on Advanced Semiconductor Devices and Microsystems (Cat. No.98EX172) Advanced semiconductor devices and microsystems Advanced Semiconductor Devices and Microsystems, 1998. ASDAM '98. Second International Conference on. :319-322 1998
Relation: ASDAM '98. Conference Proceedings. Second International Conference on Advances Semiconductor Devices and Microsystems
Database: IEEE Xplore Digital Library