| Title: |
H2 annealing for metallic contaminant reduction in BCD-SOI process: Benefits and drawbacks |
| Authors: |
Ghidini, Gabriella; Merlini, Daniele; Cannavo, Massimiliano; Polignano, Maria Luisa; Mica, Isabella; Galbiati, Amos; Zullino, Lucia; Turconi, Riccardo; Grasso, Salvatore; Moroni, Maurizio; Codegoni, Davide |
| Source: |
2015 45th European Solid State Device Research Conference (ESSDERC) Solid State Device Research Conference (ESSDERC), 2015 45th European. :294-297 Sep, 2015 |
| Relation: |
ESSDERC 2015 - 45th European Solid-State Device Research Conference |
| Database: |
IEEE Xplore Digital Library |