| Title: |
Cobalt compatible cleaning solutions for 14nm and beyond |
| Authors: |
Courouble, Kristell; Broussous, Lucile; Zoll, Stephane; Haxaire, Katia; Mellier, Maxime; Druais, Gael |
| Source: |
2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM) Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM), 2015 IEEE International. :119-122 May, 2015 |
| Relation: |
2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM) |
| Database: |
IEEE Xplore Digital Library |