| Title: |
High-K thin films as dielectric transducers for flexural M/NEMS resonators |
| Authors: |
Fuinel, Cecile; Daffe, Khadim; Laborde, Adrian; Thomas, Olivier; Mazenq, Laurent; Nicu, Liviu; Leichle, Thierry; Legrand, Bernard |
| Source: |
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2016 IEEE 29th International Conference on. :1193-1196 Jan, 2016 |
| Relation: |
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) |
| Database: |
IEEE Xplore Digital Library |