| Title: |
Comparative study of novel micromachined accelerometers employing MIDOS |
| Authors: |
Bochobza-Degani, O.; Seter, D.J.; Socher, E.; Kaldor, S.; Scher, E.; Nemirovsky, Y. |
| Source: |
Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291) Micro electro mechnical systems Micro Electro Mechanical Systems, 1999. MEMS '99. Twelfth IEEE International Conference on. :66-71 1999 |
| Relation: |
Proceedings of 12th International Workshop on Micro Electro Mechanical Systems - MEMS |
| Database: |
IEEE Xplore Digital Library |