| Title: |
Interface preservation during Ge-rich source/drain contact formation |
| Authors: |
Niu, C.; Raymond, M.; Kamineni, V.; Fronheiser, J.; Siddiqui, S.; Niimi, H.; Dechene, J. M.; Labonte, A.; Adusumilli, P.; Carr, A.V.; Shearer, J.; Demarest, J.; Jiang, L.; Li, J.; Hengstebeck, R.W. |
| Source: |
2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) Advanced Semiconductor Manufacturing Conference (ASMC), 2016 27th Annual SEMI. :320-323 May, 2016 |
| Relation: |
2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) |
| Database: |
IEEE Xplore Digital Library |