Thickness Measurement of Oxide and Carbonaceous Layers on a 28Si Sphere by XPS
| Title: | Thickness Measurement of Oxide and Carbonaceous Layers on a 28Si Sphere by XPS |
|---|---|
| Authors: | Zhang, L.; Kuramoto, N.; Azuma, Y.; Kurokawa, A.; Fujii, K. |
| Source: | IEEE Transactions on Instrumentation and Measurement IEEE Trans. Instrum. Meas. Instrumentation and Measurement, IEEE Transactions on. 66(6):1297-1303 Jun, 2017 |
| Database: | IEEE Xplore Digital Library |