| Title: |
Nanosecond Laser Annealing for Phosphorous Activation in Ultra-Thin Implanted Silicon-On-Insulator Substrates |
| Authors: |
Acosta Alba, P.; Kerdiles, S.; Mathieu, B.; Kachtouli, R.; Mazzamuto, F.; Toque-Tresonne, I.; Huet, K.; Besson, P.; Veillerot, M.; Aussenac, F.; Fenouillet-Beranger, C. |
| Source: |
2016 21st International Conference on Ion Implantation Technology (IIT) Ion Implantation Technology (IIT), 2016 21st International Conference on. :1-4 Sep, 2016 |
| Relation: |
2016 21st International Conference on Ion Implantation Technology (IIT) |
| Database: |
IEEE Xplore Digital Library |