| Title: |
Advanced in-production hotspot prediction and monitoring with micro-topography |
| Authors: |
Fanton, P.; Lakcher, A.; Le-Gratiet, B.; Simiz, J-G.; Hasan, T.; Prentice, C.; Hunsche, S.; Sen, N.; Greca, R. La; Tien, H.; Depre, L. |
| Source: |
2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) Advanced Semiconductor Manufacturing Conference (ASMC), 2017 28th Annual SEMI. :399-404 May, 2017 |
| Relation: |
2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) |
| Database: |
IEEE Xplore Digital Library |