| Title: |
High-K thin films for simultaneous dielectric actuation and detection of M/NEMS flexural vibration |
| Authors: |
Fuinel, Cecile; Mathieu, Fabrice; Laborde, Adrian; Mazenq, Laurent; Bergaud, Christian; Legrand, Bernard |
| Source: |
2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2017 19th International Conference on. :742-745 Jun, 2017 |
| Relation: |
2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) |
| Database: |
IEEE Xplore Digital Library |