| Title: |
A MEMS device for fracture toughness measurement of 2D nano films under TEM imaging |
| Authors: |
Cao, Changhong; Howe, Jane Y.; Yin, Daniel; Filleter, Tobin; Sun, Yu |
| Source: |
2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2017 19th International Conference on. :750-753 Jun, 2017 |
| Relation: |
2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) |
| Database: |
IEEE Xplore Digital Library |