| Title: |
Capacitive sensing electrodes with reduced squeeze-film damping |
| Authors: |
Sorger, Alexander; Classen, Johannes; Mehner, Jan |
| Source: |
2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2017 19th International Conference on. :1033-1036 Jun, 2017 |
| Relation: |
2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) |
| Database: |
IEEE Xplore Digital Library |