| Title: |
Monitoring of micro-stamping procedures utilizing MEMS microphones under acoustic vibration transduction |
| Authors: |
Wang, Chun Min; Lin, Yu-Ting; Lin, Che Hsin |
| Source: |
2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Nano/Micro Engineered and Molecular Systems (NEMS), 2017 IEEE 12th International Conference on. :106-109 Apr, 2017 |
| Relation: |
2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) |
| Database: |
IEEE Xplore Digital Library |