| Title: |
Effect of surface treatment during Ge/sup +//B/sup +/ two step ion implantation |
| Authors: |
Matsunaga, Y.; Murrell, A.J.; Foad, M.A.; Adibi, B.; Asechi, H.; Saito, S.; Shishiguchi, S.; Mineji, A. |
| Source: |
1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) Ion implantation technology Ion Implantation Technology Proceedings, 1998 International Conference on. 1:668-671 vol.1 1999 |
| Relation: |
1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98 |
| Database: |
IEEE Xplore Digital Library |