| Title: |
Range studies of aluminum, boron, and nitrogen implants in 4H-SiC |
| Authors: |
Stief, R.; Lucassen, M.; Schork, R.; Ryssel, H.; Holzlein, K.-H.; Rupp, R.; Stephani, D. |
| Source: |
1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) Ion implantation technology Ion Implantation Technology Proceedings, 1998 International Conference on. 2:760-763 vol.2 1998 |
| Relation: |
1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98 |
| Database: |
IEEE Xplore Digital Library |