| Title: |
Development of a planar type micro electro magnetic distance sensor using high aspect ratio photoresist and its application |
| Authors: |
Xianhe Ding; Kuribayashi, K.; Hashida, T. |
| Source: |
MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478) Micromechatronics and human science Micromechatronics and Human Science, 1999. MHS '99. Proceedings of 1999 International Symposium on. :227-233 1999 |
| Relation: |
MHS'99. Proceedings of the 1999 International Symposium on Micromechantronics and Human Science. Towards the New Century |
| Database: |
IEEE Xplore Digital Library |