| Title: |
Process optimization of silicon-on-sapphire vapor-phase epitaxy |
| Authors: |
Fedotov, Sergey D.; Smirnov, Dmitry I.; Sokolov, Evgeniy M.; Statsenko, Vladimir N. |
| Source: |
2018 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus) Young Researchers in Electrical and Electronic Engineering (EIConRus), 2018 IEEE Conference of Russian. :1613-1617 Jan, 2018 |
| Relation: |
2018 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus) |
| Database: |
IEEE Xplore Digital Library |