| Title: |
Hydride-chloride epitaxy of high-resistivity Si-layers on high-doped wafers |
| Authors: |
Sokolov, Evgeniy M.; Statsenko, Vladimir N.; Tarasov, Dmitry V.; Fedotov, Sergey D. |
| Source: |
2018 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus) Young Researchers in Electrical and Electronic Engineering (EIConRus), 2018 IEEE Conference of Russian. :1646-1649 Jan, 2018 |
| Relation: |
2018 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus) |
| Database: |
IEEE Xplore Digital Library |