Bistability in a CMOS-MEMS Thermally Tuned Microbeam Resonator
| Title: | Bistability in a CMOS-MEMS Thermally Tuned Microbeam Resonator |
|---|---|
| Authors: | Barcelo, J.; De Paul, I.; Bota, S.; Segura, J.; Verd, J. |
| Source: | 2018 IEEE International Symposium on Circuits and Systems (ISCAS) Circuits and Systems (ISCAS), 2018 IEEE International Symposium on. :1-5 May, 2018 |
| Relation: | 2018 IEEE International Symposium on Circuits and Systems (ISCAS) |
| Database: | IEEE Xplore Digital Library |