| Title: |
Reliability of dual-damascene local interconnects featuring cobalt on 10 nm logic technology |
| Authors: |
Griggio, F.; Palmer, J.; Pan, F.; Toledo, N.; Schmitz, A.; Tsameret, I.; Kasim, R.; Leatherman, G.; Hicks, J.; Madhavan, A.; Shin, J.; Steigerwald, J.; Yeoh, A.; Auth, C. |
| Source: |
2018 IEEE International Reliability Physics Symposium (IRPS) Reliability Physics Symposium (IRPS), 2018 IEEE International. :6E.3-1-6E.3-5 Mar, 2018 |
| Relation: |
2018 IEEE International Reliability Physics Symposium (IRPS) |
| Database: |
IEEE Xplore Digital Library |