| Title: |
Patterning challenges for monolithic silicon photonics: AP/DFM: Advanced patterning / design for manufacturability |
| Authors: |
Meagher, Colleen; Sowinski, Zoey; Yu, Chienfan; Hu, Shuren; Nummy, Karen; Ghosal, Mini Modh; Viswanathan, Ramya; Abdo, Amr; Wiltshire, Tim |
| Source: |
2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2018 29th Annual. :155-158 Apr, 2018 |
| Relation: |
2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) |
| Database: |
IEEE Xplore Digital Library |