MEMS Fabry–Pérot Interferometers With Double Membrane Mirrors for Improved Mirror Parallelism
| Title: | MEMS Fabry–Pérot Interferometers With Double Membrane Mirrors for Improved Mirror Parallelism |
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| Authors: | Huber, C.; Liu, P.; Krammer, C.; Stein, B.; Kalt, H. |
| Source: | Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 27(5):836-843 Oct, 2018 |
| Database: | IEEE Xplore Digital Library |