| Title: |
Low Cost and Highly Manufacturable MOL/BEOL Constructs in 22FDSOI Technology for High Performance and Low Power Applications |
| Authors: |
Jain, Navneet; Kim, Juhan; Davar, Sushama; Ahmed, Shibly; Kim, Jeff; Siddiqi, Arif; Herrmann, Thomas; Winkler, Joerg; Barth, Frank; Pika, Jens; Zier, Michael; Schaeffer, Jamie; Rashed, Mahbub; Mittal, Anurag; Blatchford, James; Machha, Sunil; Potta, Siva Krisha; Kashyap, Atul Kumar; Tekuru, Sravan Kumar; Gopannagari, Ram Prasad |
| Source: |
2018 IEEE 2nd Electron Devices Technology and Manufacturing Conference (EDTM) Electron Devices Technology and Manufacturing Conference (EDTM), 2018 IEEE 2nd. :91-93 Mar, 2018 |
| Relation: |
2018 IEEE 2nd Electron Devices Technology and Manufacturing Conference (EDTM) |
| Database: |
IEEE Xplore Digital Library |