Experimental extraction of BEOL composite equivalent thermal conductivities for application in self-heating simulations
| Title: | Experimental extraction of BEOL composite equivalent thermal conductivities for application in self-heating simulations |
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| Authors: | Bury, E.; Kaczer, B.; Van Beek, S.; Lintern, D. |
| Source: | 2018 48th European Solid-State Device Research Conference (ESSDERC) Solid-State Device Research Conference (ESSDERC), 2018 48th European. :186-189 Sep, 2018 |
| Relation: | ESSDERC 2018 - 48th European Solid-State Device Research Conference (ESSDERC) |
| Database: | IEEE Xplore Digital Library |