Small Force Metrology for AFM, Stylus Instruments, CMM and Nanoindenter
| Title: | Small Force Metrology for AFM, Stylus Instruments, CMM and Nanoindenter |
|---|---|
| Authors: | Brand, U.; Li, Z.; Popadic, R.; Hiller, K.; Hahn, S.; Frank, T.; Hamdana, G.; Peiner, E.; Gartner, E.; Fruhauf, J.; Nesterov, V. |
| Source: | 2018 Conference on Precision Electromagnetic Measurements (CPEM 2018) Precision Electromagnetic Measurements (CPEM 2018), 2018 Conference on. :1-2 Jul, 2018 |
| Relation: | 2018 Conference on Precision Electromagnetic Measurements (CPEM 2018) |
| Database: | IEEE Xplore Digital Library |