Silicon Nitride MOMS Oscillator for Room Temperature Quantum Optomechanics
| Title: | Silicon Nitride MOMS Oscillator for Room Temperature Quantum Optomechanics |
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| Authors: | Serra, E.; Morana, B.; Borrielli, A.; Marin, F.; Pandraud, G.; Pontin, A.; Prodi, G.A.; Sarro, P.M.; Bonaldi, M. |
| Source: | Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 27(6):1193-1203 Dec, 2018 |
| Database: | IEEE Xplore Digital Library |