| Title: |
Fabrication of MEMS based structures for characterization of thin metal films by nanoindentation technique |
| Authors: |
Saghaeian, F.; Keckes, J.; Zechner, J.; Woehlert, S.; Schreiber, K.A.; Pfaff, H.; Walter, J. |
| Source: |
2018 20th International Conference on Electronic Materials and Packaging (EMAP) Electronic Materials and Packaging (EMAP), 2018 20th International Conference on. :1-4 Dec, 2018 |
| Relation: |
2018 20th International Conference on Electronic Materials and Packaging (EMAP) |
| Database: |
IEEE Xplore Digital Library |