Extended Design Space of Silicon-on-Nothing MEMS
| Title: | Extended Design Space of Silicon-on-Nothing MEMS |
|---|---|
| Authors: | Wong, Y.; Lorenzo, S.; Miao, Y.; Bregman, J.; Solgaard, O. |
| Source: | Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 28(5):850-858 Oct, 2019 |
| Database: | IEEE Xplore Digital Library |