| Title: |
Utilizing Single Scan and Enhanced Design-Based Binning Methodologies for Improved Process Window and Hotspot Discovery |
| Authors: |
Singh, Sonal; Khokale, Shweta; Xie, Qian; Venkatachalam, Panneerselvam; Greer, Alexa; Mathur, Abhinav; Jain, Ankit |
| Source: |
2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) Advanced Semiconductor Manufacturing Conference (ASMC), 2019 30th Annual SEMI. :1-4 May, 2019 |
| Relation: |
2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) |
| Database: |
IEEE Xplore Digital Library |