| Title: |
Characterization Techniques for Ion-Implanted Layers in Silicon |
| Authors: |
Polignano, Maria Luisa; Codegoni, Davide; Galbiati, Amos; Grasso, Salvatore; Mica, Isabella; Basa, Peter; Pongracz, Anita; Kiss, Zoltan Tamas; Nadudvari, Gyorgy |
| Source: |
2018 22nd International Conference on Ion Implantation Technology (IIT) Ion Implantation Technology (IIT), 2018 22nd International Conference on. :144-152 Sep, 2018 |
| Relation: |
2018 22nd International Conference on Ion Implantation Technology (IIT) |
| Database: |
IEEE Xplore Digital Library |