| Title: |
Prevention of Temperature-Induced Dewetting of Implanted SOI via Heated Ion Implantation |
| Authors: |
Borrel, Julien; Gauthier, Alexis; Deprat, Fabien; Lu, Vincent; Abbate, Francesco; Joblot, Sylvain; Clement, Laurent-Renaud; Tupin, Heloise; Zou, Wei; Arevalo, Edwin; Chevalier, Pascal; Dutartre, Didier |
| Source: |
2018 22nd International Conference on Ion Implantation Technology (IIT) Ion Implantation Technology (IIT), 2018 22nd International Conference on. :29-32 Sep, 2018 |
| Relation: |
2018 22nd International Conference on Ion Implantation Technology (IIT) |
| Database: |
IEEE Xplore Digital Library |