| Title: |
Thin-Film Silicon Resonators on Ultra-Flexible 10 Micrometer-Thick Polyimide Substrates |
| Authors: |
Pestana, Tiago G.; Pinto, Rui M. R.; Dias, Rosana A.; Martins, Marco; Chu, Virginia; Gaspar, Joao; Conde, Joao P. |
| Source: |
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 2019 20th International Conference on. :2539-2542 Jun, 2019 |
| Relation: |
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) |
| Database: |
IEEE Xplore Digital Library |