| Title: |
Development of Technology Formation of the Optical Waveguide Structures Based on InP by Plasma Etching |
| Authors: |
Ishutkin, Sergey V.; Arykov, Vadim S.; Yunusov, Igor V.; Stepanenko, Michail V.; Troyan, Pavel E.; Zhidik, Yuriy S. |
| Source: |
2019 20th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM) Micro/Nanotechnologies and Electron Devices (EDM), 2019 20th International Conference of Young Specialists on. :53-58 Jun, 2019 |
| Relation: |
2019 20th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM) |
| Database: |
IEEE Xplore Digital Library |