A comparison between DCMS, HiPIMS and a novel ‘HiPIMS+Kick’ deposition for piezoelectric thin-films
| Title: | A comparison between DCMS, HiPIMS and a novel ‘HiPIMS+Kick’ deposition for piezoelectric thin-films |
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| Authors: | Rogan, Mhairi; O'Donnell, John; Hrebik, Jason; Franzer, Nick; Belan, Rob; Gibson, Des; McAughey, Kevin L.; Hughes, David A. |
| Source: | 2019 IEEE International Ultrasonics Symposium (IUS) Ultrasonics Symposium (IUS), 2019 IEEE International. :2616-2619 Oct, 2019 |
| Relation: | 2019 IEEE International Ultrasonics Symposium (IUS) |
| Database: | IEEE Xplore Digital Library |