| Title: |
Moisture Influence on Reliability and Electrical Characteristics of SiOC:H Low-k Dielectric Material |
| Authors: |
Vidal-Dho, Matthias; Hubert, Quentin; Gonon, Patrice; Pelissier, Bernard; Fornara, Pascal; Escales, Jean-Philippe; Potard, Pascale; Moragues, Jean-Michel; Ogier, Jean-Luc |
| Source: |
2019 IEEE International Integrated Reliability Workshop (IIRW) Integrated Reliability Workshop (IIRW), 2019 IEEE International. :1-4 Oct, 2019 |
| Relation: |
2019 IEEE International Integrated Reliability Workshop (IIRW) |
| Database: |
IEEE Xplore Digital Library |