Productivity modeling of semiconductor manufacturing equipment
| Title: | Productivity modeling of semiconductor manufacturing equipment |
|---|---|
| Authors: | Pool, M.; Bachrach, R. |
| Source: | 2000 Winter Simulation Conference Proceedings (Cat. No.00CH37165) Winter simulation conference Simulation Conference, 2000. Proceedings. Winter. 2:1423-1427 vol.2 2000 |
| Relation: | Proceedings of WSC 2000, Winter Simulation Conference |
| Database: | IEEE Xplore Digital Library |