| Title: |
Reverse tip sample scanning for precise and high-throughput electrical characterization of advanced nodes |
| Authors: |
Celano, U.; Hantschel, T.; Boehme, T.; Kanniainen, A.; Wouters, L.; Bender, H.; Bosman, N.; Drijbooms, C.; Folkersma, S.; Paredis, K.; Vandervorst, W.; der Heide, P. van |
| Source: |
2019 IEEE International Electron Devices Meeting (IEDM) Electron Devices Meeting (IEDM), 2019 IEEE International. :5.1.1-5.1.4 Dec, 2019 |
| Relation: |
2019 IEEE International Electron Devices Meeting (IEDM) |
| Database: |
IEEE Xplore Digital Library |