Misalignment Analysis and Electrical Performance of High Density 3D-IC interconnects
| Title: | Misalignment Analysis and Electrical Performance of High Density 3D-IC interconnects |
|---|---|
| Authors: | Jani, Imed; Lattard, Didier; Vivet, Pascal; Arnaud, Lucile; Beigne, Edith |
| Source: | 2019 International 3D Systems Integration Conference (3DIC) 3D Systems Integration Conference (3DIC), 2019 International. :1-4 Oct, 2019 |
| Relation: | 2019 International 3D Systems Integration Conference (3DIC) |
| Database: | IEEE Xplore Digital Library |