| Title: |
Electrical and optical localisation of leakage current and breakdown point in SiOC:H low-k dielectrics |
| Authors: |
Vidal-Dho, Matthias; Hubert, Quentin; Gonon, Patrice; Pelissier, Bernard; Lentrein, Philippe; Ray, Patrice; Moragues, Jean-Michel; Fornara, Pascal |
| Source: |
2020 IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS) Microelectronic Test Structures (ICMTS), 2020 IEEE 33rd International Conference on. :1-4 May, 2020 |
| Relation: |
2020 IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS) |
| Database: |
IEEE Xplore Digital Library |