Integration of Ruthenium-based Wordline in a 3-D NAND Memory Devices
| Title: | Integration of Ruthenium-based Wordline in a 3-D NAND Memory Devices |
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| Authors: | Breuil, L.; El Hajjam, G. K.; Ramesh, S.; Ajaykumar, A.; Arreghini, A.; Zhang, L.; Sebaai, F.; Nyns, L.; Raymaekers, T.; Rosmeulen, M.; Van den Bosch, G.; Furnemont, A. |
| Source: | 2020 IEEE International Memory Workshop (IMW) Memory Workshop (IMW), 2020 IEEE International. :1-4 May, 2020 |
| Relation: | 2020 IEEE International Memory Workshop (IMW) |
| Database: | IEEE Xplore Digital Library |