| Title: |
Influence of the Preliminary Annealing Conditions on Step Motion at the Homoepitaxy on the Si(100) Surface |
| Authors: |
Yesin, Michael Yu.; Nikiforov, Alexander I.; Deryabin, Alexander S.; Timofeev, Vyacheslav A. |
| Source: |
2020 21st International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM) Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM), 2020 21st International Conference of. :36-41 Jun, 2020 |
| Relation: |
2020 21st International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM) |
| Database: |
IEEE Xplore Digital Library |