Nonlinear Response of PZT-Actuated Resonant Micromirrors
| Title: | Nonlinear Response of PZT-Actuated Resonant Micromirrors |
|---|---|
| Authors: | Frangi, A.; Opreni, A.; Boni, N.; Fedeli, P.; Carminati, R.; Merli, M.; Mendicino, G. |
| Source: | Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 29(6):1421-1430 Dec, 2020 |
| Database: | IEEE Xplore Digital Library |