| Title: |
Characteristics of noble-gas-ion-implanted amorphous-InGaZnO films on glass |
| Authors: |
Ui, T.; Fujimoto, R.; Sakai, T.; Matsuo, D.; Setoguchi, Y.; Andoh, Y.; Tatemichi, J. |
| Source: |
2020 27th International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD) Active-Matrix Flatpanel Displays and Devices (AM-FPD), 2020 27th International Workshop on. :119-122 Sep, 2020 |
| Relation: |
2020 27th International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD) |
| Database: |
IEEE Xplore Digital Library |