| Title: |
Junction profiles of sub keV ion implantation for deep sub-quarter micron devices |
| Authors: |
Al-Bayati, A.; Tandon, S.; Doherty, R.; Murrell, A.; Wagner, D.; Foad, M.; Adibi, B.; Mickevicius, R.; Menisilenko, V.; Simeonov, S.; Jian, A.; Sing, D.; Ferguson, C.; Murto, R.; Larson, L. |
| Source: |
2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432) Ion implantation technology Ion Implantation Technology, 2000. Conference on. :87-90 2000 |
| Relation: |
2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 |
| Database: |
IEEE Xplore Digital Library |