| Title: |
RTP for shallow junction formation-monitoring with repeatable, reliable sheet resistance measurements |
| Authors: |
Aderhold, W.; Jain, A.; Foad, M.; Mayur, A. |
| Source: |
2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432) Ion implantation technology Ion Implantation Technology, 2000. Conference on. :199-202 2000 |
| Relation: |
2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 |
| Database: |
IEEE Xplore Digital Library |