| Title: |
Novel dual-axis SOI micromachined inertial sensors with optical sensing: design and fabrication |
| Authors: |
Bochobza-Degani, O.; Seter, D.J.; Socher, E.; Nemirovsky, Y. |
| Source: |
21st IEEE Convention of the Electrical and Electronic Engineers in Israel. Proceedings (Cat. No.00EX377) Electrical and electronic engineers in Israel Electrical and electronic engineers in israel, 2000. the 21st ieee convention of the. :65-68 2000 |
| Relation: |
21st IEEE Convention of the Electrical and Electronic Engineers in Israel. Proceedings |
| Database: |
IEEE Xplore Digital Library |