| Title: |
Novel CMOS compatible frontside micromachining of integrated thermoelectric sensors |
| Authors: |
Socher, E.; Bochobza-Degani, O.; Nemirovsky, Y. |
| Source: |
21st IEEE Convention of the Electrical and Electronic Engineers in Israel. Proceedings (Cat. No.00EX377) Electrical and electronic engineers in Israel Electrical and electronic engineers in israel, 2000. the 21st ieee convention of the. :417-420 2000 |
| Relation: |
21st IEEE Convention of the Electrical and Electronic Engineers in Israel. Proceedings |
| Database: |
IEEE Xplore Digital Library |