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A generalized algebraic equation for the pull-in condition in micromachined electrostatic micromirrors: modeling and characterization

Title: A generalized algebraic equation for the pull-in condition in micromachined electrostatic micromirrors: modeling and characterization
Authors: Bochobza-Degani, O.; Seter, D.J.; Socher, E.; Nemirovsky, Y.
Source: 21st IEEE Convention of the Electrical and Electronic Engineers in Israel. Proceedings (Cat. No.00EX377) Electrical and electronic engineers in Israel Electrical and electronic engineers in israel, 2000. the 21st ieee convention of the. :425-428 2000
Relation: 21st IEEE Convention of the Electrical and Electronic Engineers in Israel. Proceedings
Database: IEEE Xplore Digital Library