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Technological Approaches to the Microfabrication of Planar Slow-Wave Structures for Millimeter- and THz-Band Vacuum Electron Devices

Title: Technological Approaches to the Microfabrication of Planar Slow-Wave Structures for Millimeter- and THz-Band Vacuum Electron Devices
Authors: Starodubov, Andrei; Serdobintsev, Alexey; Galkin, Alexander; Galushka, Viktor; Torgashov, Roman; Bessonov, Dmitry; Pavlov, Anton; Rozhnev, Andrey; Torgashov, Gennady; Kozhevnikov, Ilya; Sakharov, Valentin; Ryskin, Nikita; Rasulov, Ilya
Source: 2020 International Conference on Actual Problems of Electron Devices Engineering (APEDE) Actual Problems of Electron Devices Engineering (APEDE), 2020 International Conference on Actual Problems of. :256-261 Sep, 2020
Relation: 2020 International Conference on Actual Problems of Electron Devices Engineering (APEDE)
Database: IEEE Xplore Digital Library